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TONSON TECH AUTOMATION EOUMPETN CO., LTD.
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Item NO:Small-scale production, experimentat...

Product introduction: Small plasma cleaner

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name

Small plasma cleaner

Model

TS-PL02

Dimensions (W×H×D)

560×600×420mm

reaction chamber size

Φ100×270mm

reaction chamber capacity

2L

Reaction chamber material

Imported 316 stainless steel

vacuum pump

Import 4L/S

Angle valve

Beiyi Ultra Vacuum 40KF

RF power supply

Eastcom 40KHZ 100KHZ 13.56MHZ 2.45GHZ

PLC System

Panasonic

Electrical System

Schneider

Touch screen

Panasonic 4.3 inch display control

ceramic packaging

Imported high frequency ceramics

Processing Gas

O2, Ar2, N2, H2, CF4

output power

0-600W adjustable

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