Product Introduction
This Vacuum Plasma Cleaner is a multi-purpose mechanical system that is widely used for activation, deplating, modification, etching, adhesion enhancement and cleaning.The equipment has the characteristics of environmental protection and no pollution, energy saving and cost saving, good cleaning effect and so on.
Specification
| Item NO. | TS-PL150MA |
| Power Frequency | 40KHz/13.56MHz（Optional） |
| Volume | 150L |
| Power | 0-1000W（Adjustable） |
| Cavity size(mm) | (L*W*H)500*500*600mm |
| Layer | 17 |
| Overall size | (L*W*H)1200*1100*1730mm |
| Vacuum pump | Oil pum/dry pump + Roots combination （Optional） |
| Vacuum degree | 5-100pa（Adjustable） |
| Material of Cavity | 316 stainless steel/imported aluminum alloy（Optional） |
| Gas flow control | 0-500SCCM(MFC±2%) |
| Gas channel | Two way(addability):Ar/N2/H2/CF4/02 |
| Plasma generator | 40KHz/13.56MHz（Optional） |
| Tempture of capacity | ＜30℃ |
| Control mode | PLC+Touch screen |
| Software of system control | Independent |
| Electrode ceramic | Imported high frequency ceramics |
Function
Etching: Useful for the removal of photoresist polyimide residues and silicid-based coatings;
Adhesion enhancement: The addition of highly active chemical groups to the substrate to improve the adhesive's adhesion;
Cleaning: Removal of optical material contamination and removal of organic residues, oxidation and metal salts on the material contamination;
Activation: It can cause the surface of the substrate to form the required chemical polar bonds;
Deplating: To remove metal and other materials from the treated substrate to produce various products.
Product Application
